Measurement of Gas Flow by Means of Capillary Tube Thermal Mass Flowmeters and Mass Flow Controllers
MFC-21.1 - 2015
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This Standard establishes common terminology and gives guidelines for the quality, description, principle of operation, selection, operation, installation, and flow calibration of capillary tube thermal mass flow meters and controllers for the measurement and control of the mass flow rate of gases. The content of this standard applies to single-phase flows of pure gases and gas mixtures of known composition.
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